The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2014
Filed:
Feb. 27, 2012
Toshiyuki Matsumoto, Hyogo, JP;
Tomohide Minami, Hyogo, JP;
Yuichi Douki, Kumamoto, JP;
Koji Mahara, Kumamoto, JP;
Toshiyuki Matsumoto, Hyogo, JP;
Tomohide Minami, Hyogo, JP;
Yuichi Douki, Kumamoto, JP;
Koji Mahara, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A position alignment of a transfer point of a transfer arm is performed by using a position detecting method. The method includes: detecting electrostatic capacitances in relation with a reference object for position alignment by a plurality of electrostatic capacitance detecting electrodes provided on a surface of the substrate body; communicating with each electrostatic capacitance detecting electrode and controlling a detection of each electrostatic capacitance detecting electrode; and calculating coordinates (x, y) of the reference object with respect to the substrate body based on a preset relationship between electrostatic capacitance values of multiple electrostatic capacitance detecting electrodes and a position of the reference object with respect to the substrate body.