This inventor holds 33 USPTO granted patents and 13 published patent applications, primarily in Tungsten Deposition. Top assignees: Novellus Systems Incorporated, Lam Research Corporation. Active years: 2006-2025.
Location History:
- Fremont, CA (US) (2006 - 2012)
- San Jose, CA (US) (2006 - 2024)
Company Filing History:
20 out of 993Â 
13 out of 3,932Â 
Years Active: 2006-2025
Areas of Expertise:
Title: Innovations by Juwen Gao: A Focus on Patentable Advancements
Introduction:
Juwen Gao is a prominent inventor based in San Jose, California, recognized for his substantial contributions to the field of semiconductor technology. With a total of 32 patents to his name, Gao is influencing advancements that enhance the efficiency and quality of semiconductor manufacturing processes.
Latest Patents:
Gao's latest innovations include significant patents that address critical processes in atomic layer deposition (ALD). His patent on "Rapid flush purging during atomic layer deposition" outlines methods and apparatus for purging processing chambers effectively, involving the controlled flow of purging gas from accumulators to eliminate process gases. This innovation is crucial for ensuring the subsequent introduction of reactants and maintaining the integrity of the ALD cycle.
Another notable patent, titled "Multi-layer feature fill," describes techniques and apparatuses aimed at improving the filling of semiconductor substrate structures with conductive materials. By adjusting deposition conditions between layers, this method achieves high filling quality, improved throughput, reduced precursor consumption, and minimizes surface roughness.
Career Highlights:
Throughout his career, Juwen Gao has been associated with leading companies in the semiconductor industry, including Novellus Systems Incorporated and Lam Research Corporation. His work at these organizations has significantly contributed to the advancement of manufacturing technologies and methodologies in the sector.
Collaborations:
In his journey as an inventor, Gao has collaborated with talented professionals such as Michal Danek and Raashina Humayun. These partnerships have fostered a creative environment, leading to groundbreaking discoveries and innovations in semiconductor processing.
Conclusion:
Juwen Gao exemplifies the spirit of innovation in the semiconductor industry. His patents not only enhance manufacturing techniques but also pave the way for future advancements in technology. As he continues to contribute to this rapidly evolving field, his work remains integral to the evolution of semiconductor processes and applications.