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For the Inventor, By the Inventor

Hsinchu, Taiwan

Jui-Ching Wu

USPTO Granted Patents = 15

Average Co-Inventor Count = 6.3

ph-index = 3

Forward Citations = 25(Granted Patents)


Company Filing History:

goldMedal15 out of 40,635 
 
Taiwan Semiconductor Manufacturing Comp. Ltd.
 patents

Years Active: 2013-2022

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15 patents (USPTO):Explore Patents
1. 11378894 - Lithography system with an embedded cleaning module (2022-07-05),
2. 10976672 - System and method for performing lithography process in semiconductor device fabrication (2021-04-13),
3. 10685846 - Semiconductor integrated circuit fabrication with pattern-reversing process (2020-06-16),
4. 10459353 - Lithography system with an embedded cleaning module (2019-10-29),
5. 10274838 - System and method for performing lithography process in semiconductor device fabrication (2019-04-30),
6. 10067418 - Particle removal system and method thereof (2018-09-04),
7. 9665007 - Rotary EUV collector (2017-05-30),
8. 9558944 - System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle (2017-01-31),
9. 9429858 - Rotary EUV collector (2016-08-30),
10. 9412632 - Reticle pod (2016-08-09),
11. 9229326 - Method for integrated circuit patterning (2016-01-05),
12. 9159559 - Lithography layer with quenchers to prevent pattern collapse (2015-10-13),
13. 9140987 - Method for lithography patterning (2015-09-22),
14. 9046776 - System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle (2015-06-02),
15. 8563231 - Patterning process and materials for lithography (2013-10-22),

Title: Jui-Ching Wu: Innovator in Lithography Systems

Introduction

Jui-Ching Wu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor device fabrication, holding a total of 15 patents. His work focuses on enhancing lithography systems, which are crucial for the manufacturing of integrated circuits.

Latest Patents

Among his latest patents is a "Lithography system with an embedded cleaning module." This innovative system includes an exposing module that performs lithography exposing processes using a mask secured on a mask stage. The integrated cleaning module is designed to clean the mask and the mask stage using an attraction mechanism. Another notable patent is the "System and method for performing lithography process in semiconductor device fabrication." This patent outlines systems and methods for measuring topographical heights of a substrate at various coordinates, which are then used to create a wafer map for exposure processes.

Career Highlights

Jui-Ching Wu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to push the boundaries of lithography technology. His expertise in this area has made him a valuable asset to the company and the semiconductor industry as a whole.

Collaborations

Throughout his career, Jui-Ching Wu has collaborated with talented individuals such as Shang-Chieh Chien and Jeng-Horng Chen. These collaborations have further enriched his work and contributed to the advancement of lithography systems.

Conclusion

Jui-Ching Wu's innovative contributions to lithography systems have significantly impacted the semiconductor industry. His patents reflect a commitment to improving manufacturing processes and enhancing technology.

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