Hwaseong-si, South Korea

Jongwoo Sun

USPTO Granted Patents = 20 

Average Co-Inventor Count = 4.6

ph-index = 1

Forward Citations = 7(Granted Patents)


Location History:

  • Seoul, KR (2019)
  • Hwaseong-si, KR (2020 - 2024)

Company Filing History:


Years Active: 2019-2025

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20 patents (USPTO):Explore Patents

Title: **Innovations by Jongwoo Sun: Pioneering Plasma Etching Technologies**

Introduction

Jongwoo Sun, an accomplished inventor based in Hwaseong-si, South Korea, is recognized for his significant contributions to the field of plasma etching technologies. With a notable portfolio of 19 patents, he has established himself as a leading figure in the innovative research landscape, particularly within his role at Samsung Electronics Co., Ltd.

Latest Patents

Among Jongwoo Sun's recent innovations are two notable patents that showcase his expertise in substrate processing technologies. The first patent describes an "Apparatus and Method for Plasma Etching." This invention features a sophisticated electrostatic chuck designed to enhance the plasma etching process through a precise temperature control mechanism. The apparatus includes a bonding layer, an adsorption layer, a coolant supplier system, and an advanced cooling device, all of which work together to optimize the etching of substrates.

The second patent, titled "Substrate Treating Apparatus and Substrate Treating System Having the Same," outlines a novel design for a substrate treating apparatus. This system incorporates a process chamber equipped with a dielectric window and a power antenna, enabling effective plasma generation while ensuring the protection of crucial components through an innovative etch resistor mechanism.

Career Highlights

Jongwoo Sun's career at Samsung Electronics Co., Ltd. highlights his commitment to technological advancement in semiconductor processing. His determination to innovate has led to groundbreaking techniques in plasma etching that are essential in modern manufacturing processes.

Collaborations

Throughout his tenure, Jongwoo has collaborated with talented colleagues such as Jeongil Mun and Jewoo Han. Their collective expertise and joint efforts have played a vital role in driving numerous successful projects and patent applications, reinforcing the culture of innovation at Samsung Electronics.

Conclusion

Jongwoo Sun's impressive array of patents and innovative approaches to plasma etching underscore his vital role in the semiconductor industry. His work not only contributes to Samsung Electronics’ reputation as a leader in technology but also advances the field of substrate processing, setting a high benchmark for future inventions.

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