The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 17, 2021

Filed:

Mar. 05, 2019
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Jeongil Mun, Hwaseong-si, KR;

Hyung Joo Lee, Hwaseong-si, KR;

Jongwoo Sun, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/443 (2006.01); G01J 3/02 (2006.01); G01J 3/04 (2006.01); G01N 21/27 (2006.01); G01N 21/67 (2006.01); G01N 21/68 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
G01J 3/443 (2013.01); G01J 3/0229 (2013.01); G01N 21/67 (2013.01); G01N 21/68 (2013.01); H01J 37/32972 (2013.01); G01J 3/04 (2013.01); G01J 2003/045 (2013.01);
Abstract

An optical emission spectroscopy system may include a reference light source, an analyzer to receive and analyze light transmitted from the reference light source, and a calibrator to calibrate light emitted from the reference light source. The calibrator may change a calibration ratio in accordance with an incidence angle of the light.


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