Location History:
- Seoul, KR (2009 - 2018)
- Hwaseong-si, KR (2020 - 2022)
Company Filing History:
13 out of 131,611 
1 out of 777 
Years Active: 2009-2022
Title: The Innovative Contributions of Inventor Jong-Woo Sun
Introduction
Jong-Woo Sun, an accomplished inventor based in Hwaseong-si, South Korea, has made significant contributions to the field of plasma processing, particularly in semiconductor manufacturing. With a remarkable portfolio of 13 patents, Sun continues to push the boundaries of innovation in his field.
Latest Patents
Among Jong-Woo Sun's latest patents are a plasma processing method and a plasma processing apparatus designed to enhance the manufacturing of semiconductor devices. His plasma processing method involves loading a substrate onto a lower electrode within a chamber, followed by the application of plasma power to form plasma. A key feature of this innovation is the generation of a voltage function based on a nonsinusoidal wave, which includes a DC pulse portion and a ramp portion. This voltage function is finely tuned by adjusting the slope of the ramp and its duration ratio to optimize ion energy distribution at the substrate surface. Additionally, Sun's plasma processing apparatus features a substrate chuck with a unique design, including a focus ring and an edge block for better efficiency and performance in plasma processing.
Career Highlights
Jong-Woo Sun's career includes notable positions at prominent companies such as Samsung Electronics Co., Ltd. and Semes Co., Ltd. His work in these organizations has greatly influenced advancements in semiconductor technology and plasma processing techniques.
Collaborations
Throughout his career, Sun has had the privilege of collaborating with esteemed colleagues, including Jung-Pyo Hong and Kwang-Nam Kim. These partnerships have enriched the innovation process and led to groundbreaking developments in their shared field of expertise.
Conclusion
Jong-Woo Sun's inventive spirit and dedication to advancing plasma processing technology make him a notable figure in the realm of semiconductor manufacturing. With 13 patents to his name and ongoing efforts to innovate, Sun continues to inspire future advancements in the industry. His contributions not only reflect personal achievement but also serve as a foundation for future innovations in technology.