The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Jan. 03, 2019
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Jeong-Il Mun, Hwaseong-si, KR;
Hyung-Joo Lee, Hwaseong-si, KR;
Jong-Woo Sun, Hwaseong-si, KR;
Ja-Myung Gu, Cheonan-si, KR;
Jae-Woong Hwang, Goyang-si, KR;
Jong-Hwan An, Yongin-si, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Semes Co., Ltd., Chungcheongnam-do, KR;
Abstract
A calibrator of an OES may include a cover, a reference light source and a controller. The cover may be detachably combined with a ceiling of a plasma chamber of a plasma processing apparatus. The reference light source may be installed at the cover to irradiate a reference light to the OES through an inner space of the plasma chamber. The controller may compare a spectrum of the reference light inputted into the OES with a spectrum of an actual light inputted into the OES during a plasma process in the plasma chamber to calibrate the OES. Thus, the OES may be calibrated without disassembling of the OES from the plasma chamber to decrease a time for calibrating the OES.