The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2018
Filed:
Apr. 29, 2016
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Jung-Pyo Hong, Seoul, KR;
Kwang-Nam Kim, Suwon-si, KR;
Sang-Dong Kwon, Seoul, KR;
Jong-Woo Sun, Seoul, KR;
Sang-Rok Oh, Yongin-si, KR;
Yong-Moon Jang, Incheon, KR;
Abstract
Provided are substrate processing apparatuses including a temperature measurement unit. The substrate processing apparatus comprises a chamber including a substrate processing region, a dielectric sheet that is disposed on the substrate processing region and includes an insertion hole and a temperature measurement unit that is disposed on the dielectric sheet to measure the temperature of the dielectric sheet, and has a screw portion inserted into the insertion hole, wherein each of the insertion hole and the screw portion has thread helixes meshed with each other.