The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2009
Filed:
Feb. 07, 2007
Applicants:
Sung-wook Hwang, Seoul, KR;
Do-haing Lee, Hwaseong-si, KR;
Chul-ho Shin, Yongin-si, KR;
Jong-woo Sun, Seoul, KR;
Inventors:
Sung-Wook Hwang, Seoul, KR;
Do-Haing Lee, Hwaseong-si, KR;
Chul-Ho Shin, Yongin-si, KR;
Jong-Woo Sun, Seoul, KR;
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 1/08 (2006.01); H01J 1/36 (2006.01); H01J 1/46 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus and/or method for controlling an ion beam may be provided, and/or a method for preparing an extraction electrode for the same may be provided. In the apparatus, a plurality of extraction electrodes may be disposed in a path of an ion beam. At least one extraction electrode may include a plurality of sub-grids.