Company Filing History:
Years Active: 2006-2018
Title: Innovations of Joachim Stuehler
Introduction
Joachim Stuehler is a notable inventor based in Aalen, Germany. He holds a total of 11 patents, showcasing his significant contributions to the field of technology and engineering. His work primarily focuses on advancements in illumination systems and projection optics.
Latest Patents
Among his latest patents is an illumination system and projection objective of a mask inspection apparatus. This invention provides an illumination system that illuminates a mask with a bundle of rays, where the centroid ray's direction depends on the location of incidence on the mask. Another significant patent is a projection exposure system for microlithography, which includes a mask holding device, a substrate holding device, and projection optics that image mask structures onto a substrate during exposure. This system is designed to simultaneously image both the mask structures and a measurement structure, enhancing the precision of the exposure process.
Career Highlights
Throughout his career, Joachim Stuehler has worked with prominent companies such as Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in the field.
Collaborations
Joachim has collaborated with notable colleagues, including Oswald Gromer and Ulrich Mueller. Their combined expertise has likely fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Joachim Stuehler's contributions to the field of technology through his patents and collaborations highlight his role as a significant inventor. His work continues to influence advancements in illumination systems and projection optics.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.