The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2010
Filed:
Jul. 29, 2008
Michael Arnz, Oberkochen, DE;
Oswald Gromer, Heidenheim, DE;
Gerd Klose, Oberkochen, DE;
Joachim Stuehler, Aalen, DE;
Matthias Manger, Aalen, DE;
Michael Arnz, Oberkochen, DE;
Oswald Gromer, Heidenheim, DE;
Gerd Klose, Oberkochen, DE;
Joachim Stuehler, Aalen, DE;
Matthias Manger, Aalen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A scattered light measurement device includes an illumination mask providing measuring radiation on an entrance side () of a test component () and a detection part (-) for detection of light scattered by the test component and disposed on an exit side () of the test component. The illumination mask includes at least one scattered light measurement structure, wherein the scattered light measurement structure has a scattered light marker zone and wherein the scattered light marker zone has a rotationally non-symmetric shape.