Hualun Chen

Title: Hualun Chen: Innovator in Semiconductor Technology

Introduction

Hualun Chen is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor technology, holding a total of five patents. His innovative work focuses on methods for manufacturing MOSFETs and OTP memory devices.

Latest Patents

One of Hualun Chen's latest patents is a method for making a MOSFET. This method involves forming a gate oxide layer on a substrate, depositing and forming a polysilicon layer on the gate oxide layer, and then removing both layers in a target area through dry etching. The remaining gate oxide layer becomes the gate oxide of the MOSFET, while the remaining polysilicon layer forms the gate. Additionally, the method includes LDD implantation on both sides of the gate to create first and second LDD areas, followed by SD implantation to form the source and drain. Notably, fluorine ion implantation is performed before one of the steps after the polysilicon layer is deposited.

Another significant patent is related to OTP memory and the method for making it. This patent describes a cell structure with intersecting active regions, where an EDNMOS is formed in one region and a PMOS in another. The PMOS is programmed using hot carriers generated in the drift region of the EDNMOS, and the patent also outlines a method for manufacturing this OTP memory, emphasizing high-speed writing capabilities.

Career Highlights

Hualun Chen has worked with notable companies in the semiconductor industry, including Shanghai Huahong Grace Semiconductor Manufacturing Corporation and Hua Hong Semiconductor (Wuxi) Limited. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor manufacturing.

Collaborations

Hualun Chen has collaborated with talented individuals in his field, including Yu Chen and Junwen Liu. These collaborations have contributed to the advancement of semiconductor technologies and the successful development of his patented inventions.

Conclusion

Hualun Chen is a distinguished inventor whose work in semiconductor technology has led to significant advancements in the manufacturing of MOSFETs and OTP memory devices. His contributions continue to influence the industry and inspire future innovations.