The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2018
Filed:
Nov. 29, 2016
Applicant:
Shanghai Huahong Grace Semiconductor Manufacturing Corporation, Shanghai, CN;
Inventors:
Hualun Chen, Shanghai, CN;
Weiran Kong, Shanghai, CN;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); H01L 27/02 (2006.01);
U.S. Cl.
CPC ...
G06F 17/5072 (2013.01); G06F 17/5081 (2013.01); H01L 27/0207 (2013.01);
Abstract
A dummy pattern filling method, including: Step I, determining the rule of filling dummy patterns, in accordance with required DR values and isolation rules of patterns; Step II, finding out blank Fields within said layout that need to be filled with dummy patterns; Step III, by following said rule of filling dummy patterns, filling dummy patterns within blank Fields on layouts. Implementing a Smart Dummy Pattern Filling, which enables the Data Ratio (DR) of dummy patterns to come infinitely close the required DR value after completing the filling of dummy patterns.