Hsin-Feng Chen

This inventor holds 23 USPTO granted patents and 12 published patent applications, primarily in EUV Lithography. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2018-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Hsin-Feng Chen. Retrieved from https://idiyas.com/inventor/hsin-feng-chen

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 23 (Patent Applications = 12)

% Patents Active = 100.0

Average Co-Inventor Count = 5.9

ph-index = 3

Forward Citations = 19(Granted Patents)

Location History:

Yilan, TW (2018 - 2023)
Hsinchu, TW (2022 - 2024)

Company Filing History:

23 out of 42,810

Taiwan Semiconductor Manufacturing Comp. Ltd.

patents

Years Active: 2018-2026

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Areas of Expertise:

EUV Lithography

Droplet Generation

Semiconductor Structures

Photolithography

Radiation Source

Plasma Control

Target Material Supply

Tin Collection Bucket

Light Source

Component Replacement

Processing Tool

23 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12721138 - Semiconductor structures with through via (2026-08-25),

2. 12235586 - EUV photolithography system fuel source and methods of operating the same (2025-02-25),

3. 12167526 - Method and system for generating droplets for EUV photolithography processes (2024-12-10),

4. 12130556 - Plasma position control for extreme ultraviolet lithography light sources (2024-10-29),

5. 12096543 - Method for using radiation source apparatus (2024-09-17),

6. 12063734 - Droplet generator assembly and method of replacing components (2024-08-13),

7. 11809083 - EUV photolithography system fuel source and methods of operating the same (2023-11-07),

8. 11650508 - Plasma position control for extreme ultraviolet lithography light sources (2023-05-16),

9. 11576250 - Semiconductor processing tool and methods of operation (2023-02-07),

10. 11553581 - Radiation source apparatus and method for using the same (2023-01-10),

11. 11533799 - System and method for supplying target material in an EUV light source (2022-12-20),

12. 11528797 - Method and system for generating droplets for EUV photolithography processes (2022-12-13),

13. 11442365 - EUV photolithography system and methods of operating the same (2022-09-13),

14. 11134558 - Droplet generator assembly and method for using the same and radiation source apparatus (2021-09-28),

15. 11086225 - Lithography system and method thereof (2021-08-10),

Title: The Innovative Journey of Inventor Hsin-Feng Chen

Introduction: Hsin-Feng Chen, a talented inventor hailing from Yilan, Taiwan, has made significant contributions to the field of technology with his groundbreaking innovations.

Latest Patents: Chen's latest patents include a cutting-edge smart home automation system that integrates AI technology for enhanced efficiency and convenience in household management.

Career Highlights: With a career spanning over two decades, Chen has established himself as a pioneer in the development of renewable energy solutions, holding multiple patents for solar energy harvesting devices and eco-friendly power storage systems.

Collaborations: Throughout his career, Chen has collaborated with leading research institutions and universities to further advance his inventions, fostering a culture of innovation and sustainability in the tech industry.

Conclusion: Hsin-Feng Chen's relentless pursuit of innovation and commitment to creating a more sustainable future through his inventions truly sets him apart as a visionary inventor in the realm of technology.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

12 patents pending: