The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2021
Filed:
Jul. 11, 2019
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Shih-Yu Tu, Hsinchu County, TW;
Yu-Kuang Sun, Hsinchu, TW;
Shao-Hua Wang, Taoyuan, TW;
Han-Lung Chang, Kaohsiung, TW;
Hsiao-Lun Chang, Tainan, TW;
Li-Jui Chen, Hsinchu, TW;
Po-Chung Cheng, Chiayi County, TW;
Cheng-Hao Lai, Taichung, TW;
Hsin-Feng Chen, Yilan, TW;
Wei-Shin Cheng, Hsinchu, TW;
Ming-Hsun Tsai, Hsinchu, TW;
Yen-Hsun Chen, Taipei, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Abstract
A droplet generator assembly includes a storage tank, a refill system, a droplet generator, and a temperature control system. The storage tank is configured to store a target material. The refill system is connected to the storage tank. The droplet generator includes a reservoir and a nozzle connected to the reservoir, in which the droplet generator is connected to the refill system, and the refill system is configured to deliver the target material to the reservoir. The temperature control system is adjacent to the refill system or the reservoir.