Inventors with similar research interests:
Location History:
- Zhongpu Township, TW (2021 - 2022)
- Chiayi, TW (2019 - 2023)
- Zhongpu Shiang, TW (2014 - 2024)
- Chiayi County, TW (2018 - 2024)
- Zhongpu Township, Chiayi County, TW (2019 - 2024)
- Longxing Village, TW (2020 - 2024)
- Zhongpu Shiang, Chiayi County, TW (2024)
Company Filing History:
Years Active: 2014-2025
Areas of Expertise:
Title: Po-Chung Cheng: Innovating the Future of Semiconductor Manufacturing
Introduction:
Po-Chung Cheng, a brilliant inventor hailing from Chiayi County, Taiwan, has made remarkable contributions to the field of semiconductor manufacturing. With an impressive portfolio of 127 patents, Cheng has played a pivotal role in driving innovation at Taiwan Semiconductor Manufacturing Company Ltd. (TSMC). Known for his expertise in extreme ultraviolet (EUV) lithography and lithography mask design, Cheng's latest patents demonstrate his commitment to pushing the boundaries of technology.
Latest Patents:
Cheng's recent patents showcase his ingenuity and dedication to solving critical challenges in semiconductor manufacturing. One of his notable inventions is the "Module vessel with scrubber gutters sized to prevent overflow." This EUV source includes a module vessel with a scrubber system equipped with gutters, effectively preventing overflow during the manufacturing process. This innovation ensures smooth functionality and optimal performance of EUV sources.
Another groundbreaking patent by Cheng is the "EUV lithography mask with a porous reflective multilayer structure." This lithography mask incorporates a reflective structure composed of porous layers, resulting in enhanced performance. By employing a multilayer reflective structure over a low thermal expansion material (LTEM) substrate, Cheng's invention significantly improves the quality and accuracy of lithography masks used in the manufacturing of semiconductors.
Career Highlights:
Throughout his illustrious career, Cheng has been a driving force behind TSMC's technological advancements. Through his continuous research and development efforts, he has become renowned for his expertise in EUV lithography, a critical technology used in advanced semiconductor manufacturing processes. Cheng's patents highlight his meticulous approach to addressing complex challenges faced by the industry.
Collaborations:
Cheng has had the privilege of collaborating with esteemed colleagues, including Li-Jui Chen and Shang-Chieh Chien. Together, they have contributed to several significant innovations in semiconductor manufacturing. Their collaborative efforts have not only advanced TSMC's technological capabilities but have also elevated Taiwan's role as a global leader in the semiconductor industry.
Conclusion:
Po-Chung Cheng's contributions to the field of semiconductor manufacturing have showcased his outstanding talent and commitment to innovation. With an impressive portfolio containing 127 patents, his groundbreaking inventions have significantly impacted the industry. Cheng's latest patents, including the module vessel with scrubber gutters and the EUV lithography mask with a porous reflective multilayer structure, demonstrate his remarkable ability to overcome complex challenges and push the boundaries of technological advancement. As an integral part of TSMC, Po-Chung Cheng continues to shape the future of semiconductor manufacturing, solidifying Taiwan's position as an innovation hub in the global market.