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For the Inventor, By the Inventor

Hsinchu County, Taiwan

Shih-Yu Tu

USPTO Granted Patents = 14 

Average Co-Inventor Count = 6.0

ph-index = 1

Forward Citations = 5(Granted Patents)


Location History:

  • Hsinchu County, TW (2021 - 2024)
  • Zhubei, TW (2022 - 2024)
  • Hsinchu, TW (2023 - 2024)

Company Filing History:

goldMedal14 out of 40,635 
 
Taiwan Semiconductor Manufacturing Comp. Ltd.
 patents

Years Active: 2021-2025

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14 patents (USPTO):
1. 12487534 - Semiconductor processing tool and methods of operation (2025-12-02),
2. 12235586 - EUV photolithography system fuel source and methods of operating the same (2025-02-25),
3. 12210296 - Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit (2025-01-28),
4. 12085865 - System and method for detecting debris in a photolithography system (2024-09-10),
5. 11997778 - Replacement and refill method for droplet generator (2024-05-28),
6. 11953839 - Highly efficient automatic particle cleaner method for EUV systems (2024-04-09),
7. 11809083 - EUV photolithography system fuel source and methods of operating the same (2023-11-07),
8. 11693324 - System and method for detecting debris in a photolithography system (2023-07-04),
9. 11599030 - Droplet catcher, droplet catcher system of EUV lithography apparatus, and maintenance method of the EUV lithography apparatus (2023-03-07),
10. 11528798 - Replacement method for droplet generator (2022-12-13),
11. 11520246 - Highly efficient automatic particle cleaner method for EUV systems (2022-12-06),
12. 11134558 - Droplet generator assembly and method for using the same and radiation source apparatus (2021-09-28),
13. 11067906 - Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance method (2021-07-20),
14. 11032897 - Refill and replacement method for droplet generator (2021-06-08),

Title: Inventor Shih-Yu Tu: Revolutionizing Technology in Hsinchu County

Introduction: Shih-Yu Tu is a pioneering inventor based in Hsinchu County, Taiwan, known for her groundbreaking contributions to the field of technology.

Latest Patents: Shih-Yu Tu holds several patents in the areas of semiconductor technology and renewable energy solutions, showcasing her innovative mindset and commitment to sustainable development.

Career Highlights: With a career spanning over two decades, Shih-Yu Tu has worked tirelessly to develop cutting-edge technologies that have significantly impacted various industries. Her passion for innovation has led to the creation of numerous groundbreaking inventions.

Collaborations: Throughout her career, Shih-Yu Tu has collaborated with leading research institutions, universities, and tech companies to further advance technological innovation. Her collaborative efforts have resulted in the successful implementation of several game-changing inventions.

Conclusion: Shih-Yu Tu's dedication to pushing the boundaries of technology and her relentless pursuit of innovation make her a true trailblazer in the field of inventions. Her work continues to inspire future generations of inventors and researchers worldwide.

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