Company Filing History:
Years Active: 2020-2025
Title: Innovations by Wei-Shin Cheng in Photolithography Technology
Introduction: Wei-Shin Cheng, a prominent inventor located in Hsinchu, Taiwan, has made significant contributions to the field of photolithography with a total of 19 patents to his name. His innovative work predominantly focuses on enhancing the efficiency and reliability of extreme ultraviolet (EUV) photolithography systems, which are crucial in semiconductor manufacturing.
Latest Patents: Cheng's latest patents showcase groundbreaking advancements in photolithography technology. One notable patent, titled "System and method for detecting debris in a photolithography system," introduces a scanner that directs EUV light onto an EUV reticle. This innovative system includes contamination reduction structures that attract and decompose contaminant particles, thereby ensuring a cleaner operational environment within the scanner. Another key patent, "EUV photolithography system fuel source and methods of operating the same," addresses the removal of impurities in liquefied solid fuel utilized in droplet generators, which enhances droplet formation stability and positively impacts wafer yield and the lifespan of droplet generators.
Career Highlights: Wei-Shin Cheng has established himself as a leading figure in the semiconductor industry through his work at Taiwan Semiconductor Manufacturing Company Limited. His extensive experience and innovative mindset have significantly contributed to improving photolithography techniques, consequently benefiting the production of advanced semiconductor devices.
Collaborations: Throughout his career, Cheng has collaborated with other talented professionals, including Li-Jui Chen and Cheng-Hao Lai. These collaborations have fostered a creative environment that has led to technological advancements and novel solutions in the semiconductor field.
Conclusion: Wei-Shin Cheng's inventive spirit and dedication to advancing photolithography technology have positioned him as a key inventor in the semiconductor industry. His latest patents reflect a commitment to enhancing system reliability and efficiency, promising a brighter future for semiconductor manufacturing. As innovations continue to emerge from his work, the impact of his contributions will undoubtedly resonate throughout the industry for years to come.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.