Location History:
- Koshi, JP (2012 - 2018)
- Kumamoto, JP (2015 - 2024)
Company Filing History:
9 out of 10,341 
1 out of 58,131 
Years Active: 2012-2024
Title: Hirotaka Maruyama: Innovator in Substrate Processing Technology
Introduction
Hirotaka Maruyama is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 9 patents. His innovative work has advanced the technology used in various industries, particularly in semiconductor manufacturing.
Latest Patents
One of Maruyama's latest patents is a substrate processing apparatus. This apparatus includes a processing chamber, a substrate holder that holds a substrate, a processing liquid supply that delivers a processing liquid to the substrate, an infrared camera that captures an infrared image of the processing chamber, and a controller that detects the state of the processing liquid based on the infrared image while monitoring for any abnormalities. Another notable patent is for a liquid processing method, substrate processing apparatus, and storage medium. This method involves drying a substrate in a processing container after liquid processing. It supplies a low humidity gas to reduce humidity during the processing liquid application and stops the liquid supply once the humidity reaches a preset target value.
Career Highlights
Throughout his career, Hirotaka Maruyama has worked with leading companies in the technology sector. He has been associated with Tokyo Electron Limited and Sony Corporation, where he has applied his expertise in substrate processing technologies. His work has been instrumental in enhancing the efficiency and effectiveness of processing methods used in these organizations.
Collaborations
Maruyama has collaborated with notable professionals in his field, including Teruomi Minami and Takashi Uno. These collaborations have contributed to the development of innovative solutions in substrate processing.
Conclusion
Hirotaka Maruyama's contributions to substrate processing technology have established him as a key figure in the industry. His patents and collaborations reflect his commitment to innovation and excellence in his field.