The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Mar. 01, 2017
Tokyo Electron Limited, Tokyo, JP;
Hirotaka Maruyama, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In drying a substrate disposed inside a processing container after performing a liquid processing on the substrate, a low humidity gas for lowering a humidity inside the processing container is supplied during a time period when a processing liquid is supplied to the center portion of the substrate, and the processing liquid supplied to the center portion of the substrate is stopped after a humidity measurement value obtained by measuring the humidity inside the processing container becomes equal to or less than a preset humidity target value.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile