Location History:
- Yamanashi-ken, JP (2009)
- Yamanashi, JP (2009 - 2013)
- Nirasaki, JP (2003 - 2014)
Company Filing History:
11 out of 10,295 
3 out of 33,404 
3 out of 817 
Years Active: 2003-2014
Title: Hiroshi Sato: Innovator in Film Forming Technology
Introduction
Hiroshi Sato is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of film forming technology, holding a total of 17 patents. His work focuses on methods and systems that enhance the efficiency and effectiveness of thin film applications.
Latest Patents
Hiroshi Sato's latest patents include a film forming method, a pretreatment device, and a processing system. The film forming method involves creating a thin film comprising manganese on an object that has an insulating layer made of a low-k film with a recess. This method includes a hydrophilization step to make the surface hydrophilic, followed by a thin-film formation step using a manganese-containing material gas. This innovative approach allows for the effective formation of manganese films, such as MnOx, on low-dielectric constant insulating layers. Another patent details a film forming method that arranges a wafer with an insulating film in a processing chamber. It includes a surface modification step that supplies a compound gas containing silicon atoms and an OH group-donating gas, leading to the formation of Si—OH groups on the insulating film's surface. This is followed by a film forming step that uses a manganese-containing material to create a manganese film through a CVD method.
Career Highlights
Throughout his career, Hiroshi Sato has worked with notable companies such as Tokyo Electron Limited and Seiko Epson Corporation. His experience in these organizations has contributed to his expertise in film forming technologies and has allowed him to develop innovative solutions that address industry needs.
Collaborations
Hiroshi Sato has collaborated with esteemed colleagues, including Hitoshi Itoh and Kenji Matsumoto. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and advancements in technology.
Conclusion
Hiroshi Sato's contributions to film forming technology and his extensive patent portfolio highlight his role as a leading innovator in the field. His work continues to influence advancements in thin film applications, showcasing the importance of innovation in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.