The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2013
Filed:
May. 18, 2010
Kenji Matsumoto, Yamanashi, JP;
Hidenori Miyoshi, Yamanashi, JP;
Hitoshi Itoh, Yamanashi, JP;
Hiroshi Sato, Yamanashi, JP;
Kenji Matsumoto, Yamanashi, JP;
Hidenori Miyoshi, Yamanashi, JP;
Hitoshi Itoh, Yamanashi, JP;
Hiroshi Sato, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
[Problems]There is provided a metal oxide film forming method capable of controlling a film thickness of a metal oxide even if the metal oxide is subject to a self-limited thickness. [Means for Solving the Problems] A metal oxide film forming method includes a process (1) of supplying a metal source gas to a surface of a base before a temperature of the base reaches a film formation temperature of a metal oxide film; and a process (2) of setting the temperature of the base to be equal to or higher than the film formation temperature and forming the metal oxide film on the base by making a reaction between the metal source gas supplied to the surface of the base and residual moisture on the surface of the base.