Location History:
- Chiba, JP (1989 - 2001)
- Ome, JP (2000 - 2007)
- Tokyo, JP (2004 - 2010)
Company Filing History:
6 out of 1,458 
6 out of 42,485 
2 out of 25 
Years Active: 1989-2010
Title: Innovations of Hiroshi Sakuma
Introduction
Hiroshi Sakuma is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 17 patents. His work focuses on advanced methods for forming metal oxide films and enhancing capacitor insulation.
Latest Patents
One of his latest patents is a method for forming a metal oxide film. This innovative technique involves depositing a monoatomic film made of a metal by supplying a metal source that includes the metal and no oxygen. The process then continues with the deposition of a metal oxide film using a chemical vapor deposition (CVD) technique. This method results in a metal oxide film with superior properties and increased throughput. Another notable patent is the ALD process for capacitor dielectric. This method is designed for manufacturing semiconductor devices and includes a dual-stage deposition step. The first stage introduces tantalum penta-ethoxide into a reaction chamber containing a semiconductor substrate with a lower electrode made of ruthenium. This results in the formation of a tantalum oxide film through a vapor-phase growth method. The second stage involves removing the material gas and byproducts from the chamber using nitrogen gas, with the dual-stage process being repeated multiple times to achieve the desired film quality.
Career Highlights
Hiroshi Sakuma has worked with notable companies in the semiconductor industry, including Elpida Memory, Inc. and Hitachi, Ltd. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor manufacturing.
Collaborations
Throughout his career, Sakuma has collaborated with esteemed colleagues such as Yoshitaka Nakamura and Hidekazu Goto. These partnerships have contributed to the advancement of technology in the semiconductor field.
Conclusion
Hiroshi Sakuma's contributions to semiconductor technology through his patents and collaborations highlight his role as a leading inventor in the industry. His innovative methods continue to influence the development of advanced materials and processes in semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.