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Yamanashi, Japan

Hiroaki Ashizawa

USPTO Granted Patents = 8 (Patent Applications = 2)

Average Co-Inventor Count = 3.2

ph-index = 1

Forward Citations = 3(Granted Patents)

Location History:

Nirasaki, JP (2002 - 2019)
Yamanashi, JP (2018 - 2022)

Company Filing History:

7 out of 10,295

Tokyo Electron Limited

Tokyo Electron Limi Ted

Years Active: 2002-2024

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8 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 12119219 - Film forming method, method for manufacturing semiconductor device, film forming device, and system for manufacturing semiconductor device (2024-10-15),

2. 11348794 - Semiconductor film forming method using hydrazine-based compound gas (2022-05-31),

3. 10864548 - Film forming method and film forming apparatus (2020-12-15),

4. 10340176 - Substrate mounting method and substrate mounting device (2019-07-02),

5. 9963784 - Film forming method and film forming apparatus (2018-05-08),

6. 9331139 - Ruthenium film formation method and storage medium (2016-05-03),

7. 8021717 - Film formation method, cleaning method and film formation apparatus (2011-09-20),

8. 6407010 - Single-substrate-heat-processing apparatus and method for semiconductor process (2002-06-18),

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