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Hideaki Amano

USPTO Granted Patents = 10

Average Co-Inventor Count = 1.8

ph-index = 8

Forward Citations = 243(Granted Patents)

Location History:

Kanagawa-ken, JP (1999 - 2000)
Fuchu, JP (2004)
Tsukui-gun, JP (2006)
Zama, JP (1996 - 2008)

Company Filing History:

10 out of 10,295

Tokyo Electron Limited

Years Active: 1996-2008

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10 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 7337745 - Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor (2008-03-04),

2. 7033444 - Plasma processing apparatus, and electrode structure and table structure of processing apparatus (2006-04-25),

3. 6767429 - Vacuum processing apparatus (2004-07-27),

4. 6730369 - Device and method for plasma processing (2004-05-04),

5. 6401359 - Vacuum processing method and apparatus (2002-06-11),

6. 6392350 - Plasma processing method (2002-05-21),

7. 6333269 - Plasma treatment system and method (2001-12-25),

8. 6066568 - Plasma treatment method and system (2000-05-23),

9. 5948485 - Plasma deposition method and an apparatus therefor (1999-09-07),

10. 5554249 - Magnetron plasma processing system (1996-09-10),

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