Location History:
- Kanagawa-ken, JP (1999 - 2000)
- Fuchu, JP (2004)
- Tsukui-gun, JP (2006)
- Zama, JP (1996 - 2008)
Company Filing History:
Years Active: 1996-2008
Title: The Innovations of Hideaki Amano
Introduction
Hideaki Amano is a prominent inventor based in Zama, Japan. He has made significant contributions to the field of plasma processing technology. With a total of 10 patents to his name, Amano's work has had a substantial impact on various industrial applications.
Latest Patents
Amano's latest patents include innovative designs for electrodes and susceptors used in plasma processing apparatuses. One of his notable inventions is a susceptor that features a heater arranged in a planar state, along with upper and lower ceramic-metal composites that sandwich the heater. This design incorporates a ceramic electrostatic chuck that effectively attracts and holds objects during treatment. The electrostatic chuck is engineered to have a similar coefficient of linear thermal expansion as the upper ceramic-metal composite, which helps prevent peeling or cracking due to thermal expansion differences. Another significant patent involves an electrode structure designed for plasma processing, which includes a heater unit and a cooling block with a cooling jacket. This design ensures that the sealing characteristics of the electrode-side heat transfer space remain intact, even at high temperatures exceeding 200°C.
Career Highlights
Hideaki Amano is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop cutting-edge technologies that enhance the efficiency and effectiveness of plasma processing.
Collaborations
Amano has collaborated with notable colleagues, including Mitsuaki Komino and Yasuharu Sasaki. Their combined expertise has contributed to the advancement of technologies in their field.
Conclusion
Hideaki Amano's innovative contributions to plasma processing technology have established him as a key figure in the industry. His patents reflect a commitment to improving manufacturing processes and enhancing the performance of equipment used in various applications.