The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2008
Filed:
Sep. 22, 2000
Mitsuaki Komino, Tokyo-To, JP;
Hideaki Amano, Zama, JP;
Shosuke Endo, Nirasaki, JP;
Toshiaki Fujisato, Tama, JP;
Yasuharu Sasaki, Machida, JP;
Mitsuaki Komino, Tokyo-To, JP;
Hideaki Amano, Zama, JP;
Shosuke Endo, Nirasaki, JP;
Toshiaki Fujisato, Tama, JP;
Yasuharu Sasaki, Machida, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A susceptorincludes a heaterdisposed in a planar state, upper and lower ceramic-metal compositesA andB disposed so as to sandwich the heaterfrom above and from below, and a ceramic electrostatic chuckfor attracting and holding an object to be treated, W. The electrostatic chuck is joined to an upper surface of the upper ceramic-metal compositeA. The electrostatic chuckhas nearly the same coefficient of linear thermal expansion as that of the upper ceramic-metal compositeA. Thus, peeling or cracking of the electrostatic chuckdue to the difference in thermal expansion and contraction between the electrostatic chuckand the upper ceramic-metal compositeA can be prevented.