Kofu, Japan

Shosuke Endo


Average Co-Inventor Count = 5.4

ph-index = 9

Forward Citations = 1,279(Granted Patents)


Location History:

  • Kofu, JP (1997 - 2003)
  • Nirasaki, JP (1999 - 2008)

Company Filing History:


Years Active: 1997-2008

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9 patents (USPTO):Explore Patents

Title: Shosuke Endo: Innovator in Plasma Processing Technology

Introduction

Shosuke Endo is a prominent inventor based in Kofu, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 9 patents. His innovative work has advanced the capabilities of various apparatuses used in substrate treatment.

Latest Patents

Among his latest patents are the "Electrode, Susceptor, Plasma Processing Apparatus and Method of Making the Electrode and the Susceptor." This invention features a susceptor that includes a heater arranged in a planar state, with upper and lower ceramic-metal composites that sandwich the heater. Additionally, it incorporates a ceramic electrostatic chuck designed to attract and hold objects for treatment. The electrostatic chuck is joined to the upper surface of the upper ceramic-metal composite, ensuring that peeling or cracking due to thermal expansion differences is prevented. Another notable patent is the "Plasma Treatment Method and Apparatus," which describes an apparatus for treating substrates. This apparatus includes a chamber with an opening for substrate conveyance and a detachable baffle plate that fits around an electrode, allowing for efficient treatment processes.

Career Highlights

Shosuke Endo has worked with notable companies such as Tokyo Electron Limited and Tokyo Electron Yamanashi Limited. His experience in these organizations has allowed him to refine his expertise in plasma processing technologies and contribute to various innovative projects.

Collaborations

Throughout his career, Endo has collaborated with talented individuals, including Kosuke Imafuku and Kazuhiro Tahara. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Shosuke Endo's contributions to plasma processing technology and his impressive portfolio of patents highlight his role as a key innovator in the field. His work continues to influence advancements in substrate treatment methods and apparatuses.

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