Changhua, Taiwan

He Hui Peng

USPTO Granted Patents = 13 

Average Co-Inventor Count = 4.9

ph-index = 1

Forward Citations = 2(Granted Patents)


Location History:

  • Changhua, TW (2014 - 2024)
  • Changhua County, TW (2020 - 2024)

Company Filing History:


Years Active: 2014-2024

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13 patents (USPTO):

Title: He Hui Peng: Innovator in Semiconductor Technology

Introduction

He Hui Peng is a prominent inventor based in Changhua, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 13 patents. His innovative methods have advanced the processes involved in semiconductor manufacturing.

Latest Patents

Among his latest patents is a method for polishing semiconductor substrates. This method involves receiving a semiconductor substrate and dispensing an abrasive slurry at a first temperature to a polishing surface of a polishing pad. During the polishing process, a second abrasive slurry at a different temperature is also dispensed, enhancing the efficiency of the polishing operation. Another notable patent is for a method of metal gate surface cleaning. This method outlines the formation of an integrated circuit structure, which includes providing a metal gate, an etch stop layer, and a dielectric layer. The process involves etching these layers to create a trench and oxidizing the exposed surface of the metal gate to form a first oxide layer, which is then removed using a specific solution.

Career Highlights

He Hui Peng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in developing advanced techniques that improve the quality and efficiency of semiconductor devices.

Collaborations

He has collaborated with notable colleagues such as Liang-Guang Chen and Shich-Chang Suen, contributing to various projects that push the boundaries of semiconductor technology.

Conclusion

He Hui Peng's innovative work in semiconductor technology has led to significant advancements in the field. His patents reflect a commitment to improving manufacturing processes and enhancing product quality.

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