Location History:
- Union City, CA (US) (2004)
- Fremont, CA (US) (2003 - 2007)
- Leuveen, BE (2008)
Company Filing History:
Years Active: 2003-2008
Title: Innovations of Gian Francesco Lorusso
Introduction
Gian Francesco Lorusso is a prominent inventor based in Fremont, CA, known for his significant contributions to technology and engineering. With a total of 10 patents to his name, Lorusso has made remarkable advancements in automated feature analysis and electron beam imaging.
Latest Patents
One of Lorusso's latest patents is titled "Automated feature analysis with off-axis tilting." This invention relates to a method of automated microalignment using off-axis beam tilting. In this method, image data is collected from a region of interest on a substrate at multiple beam tilts. The potential edges of a feature to be identified in the region are determined, and computational analysis of edge-related data is performed to positively identify the feature(s). Another embodiment of this patent involves the automated detection of undercut on a feature using off-axis beam tilting. For each beam tilt, a determination is made of difference data between the edge measurement of one side and the edge measurement of the other side, allowing for the detection of an undercut on the feature from the difference data.
Another significant patent is the "Method and apparatus for aberration-insensitive electron beam imaging." This invention describes an electron beam apparatus designed for automated imaging of a substrate surface. The apparatus includes an electron source configured to emit electrons, a gun lens to focus the emitted electrons into an electron beam, and a condenser lens system that reduces the numerical aperture to an ultra-low level. An objective lens is then used to focus this ultra-low numerical aperture beam onto the substrate surface.
Career Highlights
Lorusso's career has been marked by his innovative work at Kla-Tencor Technologies Corporation, where he has developed cutting-edge technologies that enhance imaging and analysis processes in various applications. His expertise in electron beam technology and automated systems has positioned him as a leader in his field.
Collaborations
Throughout his career, Lorusso has collaborated with talented individuals such as Amir Azordegan and Luca Grella, contributing to the advancement of technology through teamwork and shared expertise.
Conclusion
Gian Francesco Lorusso's contributions to the fields of automated feature analysis and electron beam imaging demonstrate his innovative spirit and technical prowess. His patents reflect a commitment to advancing technology and improving processes in engineering and manufacturing.
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