The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2007
Filed:
Aug. 04, 2004
Gian Francesco Lorusso, Fremont, CA (US);
Luca Grella, Gilroy, CA (US);
Douglas K. Masnaghetti, San Jose, CA (US);
Amir Azordegan, Santa Clara, CA (US);
Gian Francesco Lorusso, Fremont, CA (US);
Luca Grella, Gilroy, CA (US);
Douglas K. Masnaghetti, San Jose, CA (US);
Amir Azordegan, Santa Clara, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
The disclosure relates to a method and system of electron beam scanning for measurement, inspection or review. In accordance with one embodiment, the method includes a first scan on a region to collect first image data. The first image data is processed to determine information about a feature in the region. A scanning method is selected for imaging the feature. A second scan using the selected scanning method on the feature is then applied to collect second image data.