The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2008
Filed:
Feb. 22, 2006
Amir Azordegan, Santa Clara, CA (US);
Hedong Yang, Santa Clara, CA (US);
Gongyuan Qu, San Jose, CA (US);
Gian Francesco Lorusso, Leuveen, BE;
Amir Azordegan, Santa Clara, CA (US);
Hedong Yang, Santa Clara, CA (US);
Gongyuan Qu, San Jose, CA (US);
Gian Francesco Lorusso, Leuveen, BE;
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
One embodiment relates to a method of automated microalignment using off-axis beam tilting. Image data is collected from a region of interest on a substrate at multiple beam tilts. Potential edges of a feature to be identified in the region are determined, and computational analysis of edge-related data is performed to positively identify the feature(s). Another embodiment relates to a method of automated detection of undercut on a feature using off-axis beam tilting. For each beam tilt, a determination is made of difference data between the edge measurement of one side and the edge measurement of the other side. An undercut on the feature is detected from the difference data. Other embodiments are also disclosed.