The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Oct. 03, 2002
Gian Francesco Lorusso, Fremont, CA (US);
Robert Anthony Watts, Folsom, CA (US);
Alexander Jozef Gubbens, Redwood City, CA (US);
Laurence Stuart Hordon, Santa Clara, CA (US);
Gian Francesco Lorusso, Fremont, CA (US);
Robert Anthony Watts, Folsom, CA (US);
Alexander Jozef Gubbens, Redwood City, CA (US);
Laurence Stuart Hordon, Santa Clara, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
A highly accurate technique for inspecting semiconductor devices is described. The technique involves utilizing multiple sets of measurement data obtained by a scanning electron microscope (SEM) to determine the dimensional parameters of a semiconductor device. The SEM collects each set of data from a different angular orientation with respect to the device. The dimensional parameters of the semiconductor device are determined by analyzing the relationship between the SEM inspection angle and the collected data sets. Various configurations of an SEM can be used to implement this invention. For instance an electron beam inspection system of the present invention can have at least two sets of deflectors for guiding the electron beam, a swiveling specimen stage, and/or a set of detectors set about the specimen at different angular orientations.