Robert Anthony Watts

Title: The Innovative Contributions of Robert Anthony Watts

Introduction

Robert Anthony Watts, based in Folsom, California, is a distinguished inventor known for his significant contributions to semiconductor technology. With a total of two patents to his name, Watts has developed cutting-edge techniques that enhance the precision of semiconductor device inspection.

Latest Patents

Watts' latest patents demonstrate his expertise in semiconductor measurement techniques. The first patent details a method for SEM profile and surface reconstruction using multiple data sets. This innovative technique provides a highly accurate approach for inspecting semiconductor devices by utilizing data obtained from a scanning electron microscope. By collecting data from various angular orientations, the relationship between the SEM inspection angle and the collected data sets is analyzed to determine the dimensional parameters of the device. This method allows flexible configurations of the SEM, including systems with multiple deflectors, swiveling specimen stages, and various detectors placed at different angles.

The second patent focuses on the apparatus and methods for modeling process effects and imaging effects in scanning electron microscopy. This invention discloses a method for generating a test recipe for a metrology tool, which involves creating a series of reference images designed to fabricate structures on a sample. The test recipe is generated or modified to include second reference images that simulate process effects and imaging effects related to the fabrication of the structures, emphasizing the accuracy and reliability of the measurement process.

Career Highlights

Throughout his career, Robert Watts has made substantial contributions to the field while working for notable companies such as Kla Tencor Corporation and Kla-Tencor Technologies Corporation. His innovations have fueled advancements in semiconductor technology, showcasing his dedication to improving industrial processes.

Collaborations

Watts has collaborated with esteemed colleagues, including Ridge C. McGhee and Mohan Ananthanarayanan. These partnerships have fostered an environment of innovation and shared expertise, further pushing the boundaries of what is achievable in semiconductor inspection technology.

Conclusion

Robert Anthony Watts' work exemplifies the spirit of innovation that drives the semiconductor industry forward. His patents not only enhance measurement techniques but also contribute to the accuracy and reliability essential in the production of semiconductor devices. As technology continues to evolve, the impact of Watts' contributions will undoubtedly be felt across the industry for years to come.