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For the Inventor, By the Inventor

Yongin, South Korea

DongSub Choi

USPTO Granted Patents = 11

Average Co-Inventor Count = 3.7

ph-index = 5

Forward Citations = 81(Granted Patents)


Location History:

  • Gyeonggi-do, KR (2016)
  • Yongin, KR (2012 - 2020)

Company Filing History:

goldMedal11 out of 1,787 
 
Kla Tencor Corporation
 patents

Years Active: 2012-2020

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11 patents (USPTO):
1. 10725385 - Optimizing the utilization of metrology tools (2020-07-28),
2. 10409171 - Overlay control with non-zero offset prediction (2019-09-10),
3. 10303835 - Method and apparatus for direct self assembly in target design and production (2019-05-28),
4. 10295993 - Method and system for detecting and correcting problematic advanced process control parameters (2019-05-21),
5. 10095121 - Optimizing the utilization of metrology tools (2018-10-09),
6. 9709903 - Overlay target geometry for measuring multiple pitches (2017-07-18),
7. 9476838 - Hybrid imaging and scatterometry targets (2016-10-25),
8. 9466100 - Focus monitoring method using asymmetry embedded imaging target (2016-10-11),
9. 9116442 - Feedforward/feedback litho process control of stress and overlay (2015-08-25),
10. 9093458 - Device correlated metrology (DCM) for OVL with embedded SEM structure overlay targets (2015-07-28),
11. 8111376 - Feedforward/feedback litho process control of stress and overlay (2012-02-07),

Title: The Innovative Contributions of DongSub Choi

Introduction

DongSub Choi is a prominent inventor based in Yongin, South Korea. He has made significant contributions to the field of metrology and lithography, holding a total of 11 patents. His work focuses on optimizing processes that enhance the precision and efficiency of manufacturing technologies.

Latest Patents

One of DongSub Choi's latest patents is titled "Optimizing the utilization of metrology tools." This method involves receiving measurements from a metrology tool, deriving a merit figure, and providing correction factors to improve lithography processes. Another notable patent is "Overlay control with non-zero offset prediction," which describes a process control system that utilizes after-development inspection data to predict offsets and optimize lithography tool parameters.

Career Highlights

DongSub Choi is currently employed at Kla Tencor Corporation, a leading company in the field of semiconductor manufacturing equipment. His innovative approaches have significantly impacted the efficiency of lithography processes, making him a valuable asset to his organization.

Collaborations

Throughout his career, DongSub Choi has collaborated with notable colleagues, including David Tien and Michael E Adel. These partnerships have fostered an environment of innovation and have contributed to the advancement of technology in their field.

Conclusion

DongSub Choi's contributions to metrology and lithography exemplify the impact of innovative thinking in technology. His patents and work at Kla Tencor Corporation highlight his role as a leading inventor in the industry.

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