The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Feb. 25, 2013
Nuriel Amir, St. Yokne'am, IL;
Dongsub Choi, Yongin, KR;
Tal Itzkovich, Kfar Uria, IL;
Daniel Kandel, Aseret, IL;
Nuriel Amir, St. Yokne'am, IL;
DongSub Choi, Yongin, KR;
Tal Itzkovich, Kfar Uria, IL;
Daniel Kandel, Aseret, IL;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Aspects of the present disclosure describe a target for use in measuring a relative position between two substantially coplanar layers of a device. The target includes periodic structures in first and second layers. Differences in relative position of the first and the second layers between the first and second periodic structures and the respective device-like structure can be measured to correct the relative position of the first and the second layers between the first and second periodic structures. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.