Singapore, Singapore

Ching-Shu Lo

USPTO Granted Patents = 6 

Average Co-Inventor Count = 3.1

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:


Years Active: 2012-2025

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6 patents (USPTO):Explore Patents

Title: Innovations of Ching-Shu Lo

Introduction

Ching-Shu Lo is a prominent inventor based in Singapore, known for his contributions to the field of lithography. With a total of 6 patents, he has made significant advancements in lithography methods and materials.

Latest Patents

Among his latest patents are the "Lithography Film Stack and Lithography Method" and the "Photoresist Coating Method." The lithography film stack is designed for immersion lithography processes and includes a photoresist, a wavelength adjusting layer, and a top coating layer. This innovative design ensures that the refractive index of the wavelength adjusting layer is greater than that of the top coating layer and the immersion fluid. The photoresist coating method involves a series of steps that optimize the application of photoresist on a wafer, enhancing the efficiency of the coating process.

Career Highlights

Ching-Shu Lo has worked with notable companies such as United Microelectronics Corporation and United Semiconductor (Xiamen) Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to cutting-edge technologies in the semiconductor industry.

Collaborations

Ching-Shu Lo has collaborated with several professionals in his field, including Jie Zhao and Chia-Ping Chen, who have contributed to his innovative projects.

Conclusion

Ching-Shu Lo's work in lithography has positioned him as a key figure in the industry, with his patents reflecting his commitment to advancing technology. His contributions continue to influence the field and inspire future innovations.

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