Ching Ling Meng

This inventor holds 14 USPTO granted patents and 3 published patent applications, primarily in Semiconductor Processing. Top assignees: Kla-Tencor Technologies Corporation, Tokyo Electron Limited. Active years: 2005-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Ching Ling Meng. Retrieved from https://idiyas.com/inventor/ching-ling-meng-59ftx2vm

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank

USPTO Granted Patents = 14 (Patent Applications = 3)

% Patents Active = 71.4

Average Co-Inventor Count = 6.1

ph-index = 5

Forward Citations = 78(Granted Patents)

Location History:

Fremont, CA (US) (2005 - 2022)
Sunnyvale, CA (US) (2021 - 2024)

Company Filing History:

9 out of 641

Kla-Tencor Technologies Corporation

patents

5 out of 10,947

Tokyo Electron Limited

patents

Years Active: 2005-2026

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Areas of Expertise:

Optical Sensors

Plasma Processing

Polishing Monitoring

Process Monitoring

Polymer Measurement

Eddy Current Device

Measurement Device

Two-Dimensional Mapping

Characteristic Detection

Consumable Parts

In-Situ Monitoring

Process Tool

14 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12588467 - Optical sensors for measuring properties of consumable parts in a semiconductor plasma processing chamber (2026-03-24),

2. 12261030 - Normal-incidence in-situ process monitor sensor (2025-03-25),

3. 11961721 - Normal-incidence in-situ process monitor sensor (2024-04-16),

4. 11385154 - Apparatus and method for monitoring and measuring properties of polymers in solutions (2022-07-12),

5. 10978278 - Normal-incident in-situ process monitor sensor (2021-04-13),

6. 8831767 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2014-09-09),

7. 8010222 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2011-08-30),

8. 7332438 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2008-02-19),

9. 7175503 - Methods and systems for determining a characteristic of polishing within a zone on a specimen from combined output signals of an eddy current device (2007-02-13),

10. 7052369 - Methods and systems for detecting a presence of blobs on a specimen during a polishing process (2006-05-30),

11. 7030018 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2006-04-18),

12. 6935922 - Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing (2005-08-30),

13. 6884146 - Systems and methods for characterizing a polishing process (2005-04-26),

14. 6866559 - Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad (2005-03-15),

Title: Ching Ling Meng: Pioneering Inventor from Fremont

Introduction: Ching Ling Meng is a trailblazing inventor based in Fremont, California. She is known for her innovative spirit and groundbreaking contributions to the field of technology.

Latest Patents: Ching Ling Meng holds several patents in the areas of artificial intelligence, renewable energy, and sustainable technologies. Her recent patents focus on enhancing efficiency in solar power systems and developing cutting-edge AI algorithms for various applications.

Career Highlights: With a career spanning over two decades, Ching Ling Meng has worked with leading tech companies in Silicon Valley, driving forward the frontiers of innovation. Her expertise lies in merging technology with sustainability to create impactful solutions for the future.

Collaborations: Throughout her career, Ching Ling Meng has collaborated with top researchers, engineers, and scientists to bring her inventions to life. Her collaborative efforts have led to the development of revolutionary technologies that have the potential to shape industries.

Conclusion: Ching Ling Meng's dedication to innovation and sustainability has positioned her as a prominent figure in the world of inventors. Her relentless pursuit of technological advancement continues to inspire the next generation of inventors and innovators.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

3 patents pending: