The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2005
Filed:
Feb. 04, 2003
Kurt Lehman, Menlo Park, CA (US);
Charles Chen, Sunnyvale, CA (US);
Ronald L. Allen, San Jose, CA (US);
Robert Shinagawa, Cupertino, CA (US);
Anantha Sethuraman, Palo Alto, CA (US);
Christopher F. Bevis, Los Gatos, CA (US);
Thanassis Trikas, Redwood City, CA (US);
Haiguang Chen, Millbrae, CA (US);
Ching Ling Meng, Fremont, CA (US);
Kurt Lehman, Menlo Park, CA (US);
Charles Chen, Sunnyvale, CA (US);
Ronald L. Allen, San Jose, CA (US);
Robert Shinagawa, Cupertino, CA (US);
Anantha Sethuraman, Palo Alto, CA (US);
Christopher F. Bevis, Los Gatos, CA (US);
Thanassis Trikas, Redwood City, CA (US);
Haiguang Chen, Millbrae, CA (US);
Ching Ling Meng, Fremont, CA (US);
KLA-Tencor Technologies, Milpitas, CA (US);
Abstract
Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad are provided. One window includes a first portion and a second portion. The first portion includes a first material, and the second portion includes a second material different than the first. Another window includes a substantially transparent gel. In some instances, the gel includes a triblock copolymer and a plasticizing oil. An additional window includes an upper window, a housing, and a diaphragm. The housing may allow a fluid to flow into and out of a space between the housing and the diaphragm. In another embodiment, a window includes a layer of material coupled to lateral surfaces of the window. In some cases, the window may be disposed within an opening in a polishing pad, and movement of the window within the polishing pad may compress the layer of material.