Company Filing History:

9 out of 641

Kla-tencor Technologies Corporation

patents

1 out of 10,295

Tokyo Electron Limited

patents

Years Active: 2005-2014

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10 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8831767 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2014-09-09),

2. 8010222 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2011-08-30),

3. 7332438 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2008-02-19),

4. 7230703 - Apparatus and method for measuring overlay by diffraction gratings (2007-06-12),

5. 7175503 - Methods and systems for determining a characteristic of polishing within a zone on a specimen from combined output signals of an eddy current device (2007-02-13),

6. 7052369 - Methods and systems for detecting a presence of blobs on a specimen during a polishing process (2006-05-30),

7. 7030018 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2006-04-18),

8. 6935922 - Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing (2005-08-30),

9. 6884146 - Systems and methods for characterizing a polishing process (2005-04-26),

10. 6866559 - Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad (2005-03-15),

Title: **Robert Shinagawa: A Pioneer in Polishing Technology**

Introduction

Robert Shinagawa, an innovative inventor based in Cupertino, CA, has made significant contributions to the field of polishing technology. With an impressive portfolio of 10 patents, he has been instrumental in advancing methodologies for monitoring and enhancing the performance of polishing devices and tools. His groundbreaking work has benefited numerous industries reliant on precision polishing techniques.

Latest Patents

Shinagawa's latest patents focus on the development of methods and systems for monitoring parameters of measurement devices during polishing processes. His innovations specifically address damage to specimens during polishing, along with characteristics of polishing pads and tools. One notable method involves scanning a specimen using a measurement device to generate output signals at designated measurement points during the polishing procedure. By determining if these output signals fall outside a predefined range, potential issues such as control limit breaches or specimen damage can be detected promptly. In a different embodiment, he also explores the scanning of polishing pads to analyze their characteristics through similar output signals, enhancing monitoring accuracy during polishing operations.

Career Highlights

Throughout his career, Robert Shinagawa has worked with several prominent companies in the technology sector, including KLA-Tencor Technologies Corporation and Tokyo Electron Limited. His experience in these organizations has uniquely positioned him to develop patented solutions that tackle real-world challenges in the polishing industry.

Collaborations

Shinagawa has collaborated with notable individuals in his field, including Kurt Lehman and Charles L. Chen. These partnerships have fostered an innovative environment that encourages creative problem-solving and the development of cutting-edge technologies.

Conclusion

Robert Shinagawa stands out as a key inventor in the realm of polishing technology, with a strong focus on enhancing the capabilities of measurement devices and polishing tools. His contributions are setting new standards in the industry, paving the way for future innovations in precision polishing and monitoring methodologies. As his portfolio continues to grow, the impact of his work will undoubtedly resonate across various sectors relying on advanced polishing techniques.

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Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.