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For the Inventor, By the Inventor

Redwood City, CA, United States of America

Thanassis Trikas

USPTO Granted Patents = 9

Average Co-Inventor Count = 9.0

ph-index = 5

Forward Citations = 75(Granted Patents)


Company Filing History:

goldMedal9 out of 641 
 
Kla-tencor Technologies Corporation
 patents

Years Active: 2005-2014

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9 patents (USPTO):Explore Patents
1. 8831767 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2014-09-09),
2. 8010222 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2011-08-30),
3. 7332438 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2008-02-19),
4. 7175503 - Methods and systems for determining a characteristic of polishing within a zone on a specimen from combined output signals of an eddy current device (2007-02-13),
5. 7052369 - Methods and systems for detecting a presence of blobs on a specimen during a polishing process (2006-05-30),
6. 7030018 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2006-04-18),
7. 6935922 - Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing (2005-08-30),
8. 6884146 - Systems and methods for characterizing a polishing process (2005-04-26),
9. 6866559 - Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad (2005-03-15),

Title: Thanassis Trikas: Innovator in Polishing Technology

Introduction

Thanassis Trikas is a notable inventor based in Redwood City, CA (US). He has made significant contributions to the field of polishing technology, holding a total of 9 patents. His work focuses on methods and systems that enhance the monitoring of measurement devices during polishing processes.

Latest Patents

Among his latest patents, Trikas has developed innovative methods for monitoring parameters of measurement devices during polishing. These methods include scanning a specimen with a measurement device to generate output signals at various measurement spots. By determining if these output signals fall outside a specified range, the methods can indicate whether the measurement device is functioning within control limits or if there is damage to the specimen. Additionally, he has created methods for scanning polishing pads to assess their characteristics based on output signals.

Career Highlights

Trikas is currently associated with KLA-Tencor Technologies Corporation, a leader in the semiconductor industry. His work at the company has been instrumental in advancing polishing technologies, which are critical for the manufacturing of semiconductor devices.

Collaborations

Throughout his career, Trikas has collaborated with esteemed colleagues, including Kurt Lehman and Charles L Chen. These partnerships have fostered innovation and contributed to the development of cutting-edge technologies in the field.

Conclusion

Thanassis Trikas stands out as a prominent inventor in polishing technology, with a strong portfolio of patents that reflect his expertise and innovative spirit. His contributions continue to shape the industry and enhance the efficiency of polishing processes.

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