Average Co-Inventor Count = 9.00
ph-index = 5
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla-tencor Technologies Corporation (9 from 641 patents)
9 patents:
1. 8831767 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
2. 8010222 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
3. 7332438 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
4. 7175503 - Methods and systems for determining a characteristic of polishing within a zone on a specimen from combined output signals of an eddy current device
5. 7052369 - Methods and systems for detecting a presence of blobs on a specimen during a polishing process
6. 7030018 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
7. 6935922 - Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing
8. 6884146 - Systems and methods for characterizing a polishing process
9. 6866559 - Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad