Chih-Yi Chang

Title: Innovations of Chih-Yi Chang

Introduction

Chih-Yi Chang is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of nine patents. His work focuses on innovative methods and structures that enhance the performance and efficiency of semiconductor devices.

Latest Patents

One of his latest patents is titled "Interconnect structure including graphite and method forming same." This patent describes a method that involves forming a first conductive feature, depositing a graphite layer over it, and patterning the graphite layer to create a graphite conductive feature. The process continues with the deposition of a dielectric spacer layer, followed by a first dielectric layer, which is then planarized. A second dielectric layer is formed over the first, and a second conductive feature is created in the second dielectric layer, ensuring electrical connection to the graphite conductive feature.

Another notable patent is "Via for semiconductor device and method." This patent outlines a structure that includes a first conductive feature within a first dielectric layer and a second dielectric layer positioned above it. The second conductive feature extends through the second dielectric layer to make physical contact with the first conductive feature. This feature includes a metal adhesion layer, a barrier layer along the sidewalls of the second dielectric layer, and a conductive filling material that extends over both the metal adhesion layer and the barrier layer.

Career Highlights

Chih-Yi Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to develop and patent innovative technologies that contribute to advancements in semiconductor manufacturing.

Collaborations

Chih-Yi Chang has collaborated with notable colleagues, including Hung-Wen Su and Liang-Yueh Ou Yang. These collaborations have fostered a productive environment for innovation and have led to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Chih-Yi Chang's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in semiconductor devices, showcasing the importance of innovation in technology.