This inventor holds 6 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 1999-2002.
Company Filing History:
Years Active: 1999-2002
Title: Chiarn-Lung Lee: Innovator in Semiconductor Technology
Introduction
Chiarn-Lung Lee is a prominent inventor based in Hsin-chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His innovative approaches have advanced the manufacturing processes in the semiconductor industry.
Latest Patents
Chiarn-Lung Lee's latest patents include a method for etching a passivation layer of a wafer. This improved method involves performing a conventional anisotropic etch to achieve a narrow groove, followed by an isotropic etch to widen the groove at the device surface. This technique ensures that the rounded edges of the groove do not cut through the adhesive layer of protective tape during subsequent processing steps. Another notable patent is a method for preventing delamination of APCVD BPSG films. This method describes the formation of BPSG layers over PECVD silicon oxide layers using atmospheric chemical vapor deposition with ozone and TEOS. It effectively prevents the formation of voids in deep depressions found in flash memory integrated circuits, thereby enhancing the reliability of the devices.
Career Highlights
Chiarn-Lung Lee has established himself as a key figure in the semiconductor industry through his work at Taiwan Semiconductor Manufacturing Company Ltd. His expertise in semiconductor fabrication processes has led to numerous advancements that benefit the industry as a whole.
Collaborations
Throughout his career, Chiarn-Lung Lee has collaborated with notable colleagues, including Han-Chung Chen and Je Wang. These collaborations have fostered innovation and contributed to the success of various projects within the semiconductor field.
Conclusion
Chiarn-Lung Lee's contributions to semiconductor technology through his patents and collaborative efforts highlight his role as an influential inventor. His work continues to impact the industry positively, paving the way for future advancements in semiconductor manufacturing.