Location History:
- Taipei, TW (1999 - 2001)
- Taipei Hsien, TW (2000 - 2002)
Company Filing History:
Years Active: 1999-2002
Title: **Chia-Chieh Yu: Innovator in Semiconductor Technology**
Introduction
Chia-Chieh Yu is a prominent inventor based in Taipei Hsien, Taiwan, known for his substantial contributions to semiconductor technology. With a remarkable portfolio of 11 patents, he has developed innovative methods that enhance the manufacturing processes within the semiconductor industry.
Latest Patents
Among his latest patents, Chia-Chieh Yu has introduced significant advancements, including a "Method of Reworking Photoresist Layer." This method involves a silicon chip comprising an insulation layer, a bottom anti-reflection coating, and a photoresist layer that has undergone light exposure and development. The process begins with a wet etching operation to remove a considerable portion of the photoresist layer, followed by a low-temperature plasma treatment to eliminate the hardened residual photoresist material without affecting the anti-reflection coating structure. This is concluded with the formation of a new photoresist layer over the bottom anti-reflection coating.
Another notable patent, "Method for Forming a Via," presents an improved technique for forming a via on a semiconductor substrate. This process includes creating a conductive line, applying an inter-metal dielectric layer, and using a patterned photoresist layer as a mask to define and expose the conductive line. The resulting via hole is essential for establishing a conductive path, with subsequent high-density plasma processing to remove the remaining photoresist layer.
Career Highlights
Chia-Chieh Yu has held significant positions within established companies, including United Semiconductor Corporation and United Microelectronics Corporation. His expertise has driven innovation and efficiency in semiconductor production methods throughout his career.
Collaborations
Throughout his professional journey, Chia-Chieh Yu has collaborated with notable colleagues, including Yueh-Feng Ho and Ta-Cheng Chou. These collaborations have contributed to multiple advancements in semiconductor fabrication technologies.
Conclusion
Chia-Chieh Yu's impactful work and patented inventions continue to shape the semiconductor industry. His innovative methods illustrate the importance of dedication to research and development, earning him recognition as a leading inventor in his field. As technology progresses, his contributions will likely play a pivotal role in advancing semiconductor manufacturing processes.