Chia-Cheng Chang

Title: Chia-Cheng Chang: Innovator in Integrated Circuit Design

Introduction

Chia-Cheng Chang is a prominent inventor based in Baoshan, China. He has made significant contributions to the field of integrated circuit design, holding a total of 12 patents. His work focuses on innovative methods and apparatuses that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

Among his latest patents is a method and apparatus for integrated circuit mask patterning. This invention discloses various integrated circuit (IC) design methods. An exemplary method involves receiving an IC design layout that includes an IC feature to be formed on a wafer using a lithography process. The method inserts a spacing in the IC feature, generating a modified IC design layout that divides the IC feature into a first main feature and a second main feature separated by the spacing. The spacing has a sub-resolution dimension, ensuring that the IC feature does not include the spacing when formed on the wafer. A mask can be fabricated based on this modified IC design layout, allowing for a lithography process to form the IC feature on the wafer without the spacing.

Another notable patent is a method for fabricating a semiconductor device. This method includes preparing initial connection patterns and cutting patterns, identifying non-functional connection patterns, and preparing final cutting patterns. A photo mask is then created from these final cutting patterns, followed by the formation of a photo resist pattern over a target layer. The target layer is patterned to create openings, and connection layers are formed by filling these openings with a conductive material.

Career Highlights

Chia-Cheng Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise in integrated circuit design has positioned him as a key player in advancing semiconductor technology.

Collaborations

Chia-Cheng has collaborated with notable colleagues, including Chin-Min Huang and Hua-Tai Lin. Their combined efforts contribute to the innovative projects within the semiconductor field.

Conclusion

Chia-Cheng Chang's contributions to integrated circuit design and semiconductor manufacturing are noteworthy. His innovative patents and career at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a leading inventor in the industry.