Chia Chang Hsu

Title: Chia Chang Hsu: Innovator in Semiconductor Technology

Introduction

Chia Chang Hsu is a prominent inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 13 patents. His innovative work has advanced the methods and processes used in semiconductor fabrication.

Latest Patents

One of Hsu's latest patents is focused on a semiconductor device and its fabrication method. This patent outlines a method for preparing a substrate with a dummy gate, where a spacer is placed on the sidewall of the dummy gate. The process includes forming a source/drain region adjacent to the dummy gate and creating a sacrificial layer on the source/drain region. A cap layer is then formed, ensuring that its top surface is coplanar with the dummy gate. The method further details a replacement metal gate (RMG) process to transform the dummy gate into a replacement metal gate. An opening is created in the cap layer to expose the sacrificial layer, which is then removed to form a lower contact hole. This innovative approach culminates in the formation of a lower contact plug within the lower contact hole.

Another notable patent by Hsu involves a semiconductor process for forming a plug. This process begins with the formation of a dielectric layer that has a recess on a substrate. A titanium layer is then applied to conformally cover the recess, followed by the formation of a first titanium nitride layer. The first sidewall parts of this layer are pulled back to create second sidewall parts, and a second titanium nitride layer is formed to cover the recess. This patent not only describes the process but also provides a semiconductor structure formed by the described method.

Career Highlights

Chia Chang Hsu is currently employed at United Microelectronics Corporation, a leading company in the semiconductor industry. His work at this organization has allowed him to push the boundaries of semiconductor technology and contribute to the development of advanced fabrication methods.

Collaborations

Hsu has collaborated with notable colleagues, including Kuo-Chih Lai and Shu Min Huang. These partnerships have fostered a collaborative environment that enhances innovation and drives progress in their field.

Conclusion

Chia Chang Hsu is a distinguished inventor whose work in semiconductor technology has led to numerous patents and advancements in fabrication methods. His contributions continue to shape the future of the semiconductor