Company Filing History:
Years Active: 2018-2024
Title: **Innovations by Chia-Ao Chang: Semiconductor Pioneer from Jinhu**
Introduction
Chia-Ao Chang is a prominent inventor based in Jinhu, China, known for his significant contributions to semiconductor technology. With a remarkable portfolio comprising nine patents, Chang is dedicated to advancing the field of electronics through innovative solutions and methodologies.
Latest Patents
Among Chia-Ao Chang's latest patents is a groundbreaking method of performing gap filling, specifically designed for filling trenches between dummy gate stacks on semiconductor fins and strips. This method incorporates the deposition of a silicon layer, which includes first portions deposited over a series of strips and second portions filled in the trenches between them. The innovative aspect involves conducting an anneal step, allowing portions of the silicon layer to migrate into the lower areas of the trenches, followed by etching to remove specific segments of the silicon layer.
Another notable patent details systems and methods of manufacturing semiconductor devices. This invention describes forming a recess between fins in a substrate and overlaying it with a dielectric layer. Following the dielectric layer application, a bottom seed structure is created within the recess, facilitating the growth of dummy gate material through a bottom-up deposition method, circumventing reliance on sidewall material.
Career Highlights
Chia-Ao Chang currently works with Taiwan Semiconductor Manufacturing Company Limited, which is recognized globally for its leadership in semiconductor manufacturing. Throughout his career, Chang has consistently demonstrated his innovative spirit, resulting in a series of patents that address critical challenges in the semiconductor industry.
Collaborations
Throughout his career, Chang has collaborated with esteemed colleagues such as De-Wei Yu and Chien-Hao Chen. These partnerships have fostered an environment of creativity and innovation, crucial for pushing the boundaries of semiconductor technology.
Conclusion
Chia-Ao Chang stands out as a key figure in the semiconductor landscape, with a robust collection of patents that exemplify his ingenuity. His work not only reflects his expertise but also contributes significantly to the advancement of semiconductor manufacturing processes, paving the way for future innovations in the electronics sector.