Chang-Sheng Lee

Title: **Chang-Sheng Lee: A Trailblazer in Semiconductor Innovation**

Introduction

Chang-Sheng Lee, an esteemed inventor based in Shin-Chu, Taiwan, has made remarkable contributions to the field of semiconductor technology, holding a total of 17 patents to his name. His work primarily focuses on enhancing processes that improve the efficiency and quality of semiconductor manufacturing.

Latest Patents

Among his significant inventions, Chang-Sheng has developed several cutting-edge patents, including:

1. **Apparatus for Preventing Backside Peeling Defects on Semiconductor Wafers**: This innovative apparatus includes a susceptor equipped with through holes and a non-reactive gas source. The design features lift pins that facilitate the motion of wafers, ensuring they are optimally supported and safeguarded against defects during production.

2. **Planarization Method, Method for Polishing Wafer, and CMP System**: This chemical-mechanical planarization (CMP) system comprises a platen, a pad, a polish head, and a rotating mechanism, complemented by a light source and detector. This invention allows for precise polishing of wafers, detecting the end-point layer using incident light for optimal results.

Career Highlights

Chang-Sheng Lee is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leader in the industry known for its advanced semiconductor fabrication technologies. His role allows him to apply his innovative ideas to real-world applications, enhancing the capabilities of semiconductor manufacturing processes.

Collaborations

Throughout his career, Chang-Sheng has collaborated with accomplished professionals, including Yen-Yu Chen and Wei Zhang. These partnerships have played a crucial role in driving forward projects and fostering an environment of innovation within the semiconductor sector.

Conclusion

As an inventor, Chang-Sheng Lee continues to push the boundaries of technology with his innovative ideas and practical applications in semiconductor manufacturing. His contributions not only underscore his expertise but also highlight the essential role inventors play in advancing modern technology.