Aptos, CA, United States of America

Carl Woods

This inventor holds 40 USPTO granted patents and 1 published patent application and 4 EPO patents, primarily in Semiconductor Processing. Top assignee: Lam Research Corporation. Active years: 2004-2015.

USPTO Granted Patents = 40 

% Patents Active = 20.0

 

Average Co-Inventor Count = 2.8

ph-index = 7

Forward Citations = 328(Granted Patents)


Company Filing History:


Years Active: 2004-2015

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Areas of Expertise:
Substrate Cleaning
Electroplating
Meniscus Application
Wafer Processing
Fluid Delivery
Dynamic Meniscus
Proximity Processing
Vacuum Systems
Nanometer Scale
Mechanical Resonance
Substrate Gripper
Multi-Phase Solutions
40 patents (USPTO):Explore Patents

Title: **The Innovative Journey of Carl Woods**

Introduction

Carl Woods, a distinguished inventor based in Aptos, California, holds an impressive portfolio of 40 patents. His innovative contributions primarily focus on advanced substrate processing technologies, which are critical in various industrial applications. Through his work, he has made significant strides in enhancing efficiency and precision in the processing environments.

Latest Patents

Among his latest patents is the **Controlled Ambient System for Interface Engineering**, which outlines a cluster architecture designed for processing substrates. This innovative system includes a lab-ambient controlled transfer module coupled with several wet substrate processing modules, enabling the management of a specific ambient environment. Additionally, it features a vacuum transfer module linking to plasma processing modules, which effectively govern a second ambient environment. The incorporation of a controlled ambient transfer module further allows for the management of a third ambient environment, facilitating the controlled processing of substrates across varying conditions.

Another notable patent is the **Method and System for Uniformly Applying a Multi-Phase Cleaning Solution to a Substrate**. This system incorporates a carrier designed to hold the substrate, coupled with a cleaning station that includes a rotatable force applicator. This applicator is capable of dispensing cleaning solution efficiently due to its hollow structure and dispersing channels, ensuring uniform application across the substrate surface.

Career Highlights

Carl Woods has made significant contributions during his tenure with Lam Research Corporation. His innovative spirit and technical expertise have garnered recognition within the industry, solidifying his status as a key player in substrate processing technologies. His impressive number of patents attests to his commitment to pushing the boundaries of engineering and technology.

Collaborations

Throughout his career, Carl has collaborated with talented coworkers such as John Martin de Larios and James Paul Garcia. These collaborations have enriched his work and have contributed to the successful development of groundbreaking technologies within their field.

Conclusion

Carl Woods exemplifies the spirit of innovation through his extensive work and numerous patents in substrate processing technologies. His contributions, particularly at Lam Research Corporation, highlight the importance of continual advancement in engineering and technology. As he continues to push the envelope, the future looks promising for both him and the industries his inventions influence.

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