The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2012
Filed:
Jun. 30, 2004
Michael Ravkin, Sunnyvale, CA (US);
John M. DE Larios, Palo Alto, CA (US);
Mikhail Korolik, San Jose, CA (US);
Michael G. R. Smith, Dublin, CA (US);
Carl Woods, Aptos, CA (US);
Michael Ravkin, Sunnyvale, CA (US);
John M. de Larios, Palo Alto, CA (US);
Mikhail Korolik, San Jose, CA (US);
Michael G. R. Smith, Dublin, CA (US);
Carl Woods, Aptos, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for preparing a surface of a substrate is provided. The method includes scanning the surface of the substrate by a meniscus, preparing the surface of the substrate using the meniscus, and performing a next preparation operation on the surface of the substrate that was prepared without performing a rinsing operation.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile